CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
X-ray multilayer mid-frequency characterizations using speckle scanning techniques
Jiang, H; Yan, S; Liang, DX; Tian, NX; Wang, H; Li, AG
2017
Conference NameConference on Advances in Metrology for X-Ray and EUV Optics VII
Source PublicationADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VII
Issue
Conference DateAUG 06-07, 2017
Conference PlaceSan Diego, CA
AbstractDetermination of multilayer structure was developed so much, but most of studies focused on the relationship between structural imperfections and reflectivity. These imperfections, whether interfacial roughness and interdiffusion or surface feature, measured by grazing X-ray scattering, atomic force microscopy or electric microscopy, reflect relatively high-frequency characteristics. The mid-frequency figure errors were regarded as the main factor to produce large satellite peaks near the focusing spot in the multilayer K-B mirror and were found to produce stripes in the far-field imaging. We report novel method to study mid-frequency interface and layer growth characterizations of multilayer structure using at-wavelength speckle scanning technique. This work is beneficial for matching multilayer manufacture technology to the optimization of beam performances.
ISSN0277-786X
ISBN978-1-5106-1228-0; 978-1-5106-1227-3
Subtype会议论文
KeywordINTERFACIAL ROUGHNESS MIRRORS SCATTERING TOPOGRAPHY METROLOGY OPTICS FIELD
DOI10.1117/12.2272194
Indexed BySCI
Language英语
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Document Type会议论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/31938
Collection中科院上海应用物理研究所2011-2019年
AffiliationChinese Acad Sci, Shanghai Inst Appl Phys, Shanghai Synchrotron Radiat Facil, Zhangheng Rd 239, Shanghai 201204, Peoples R China
Recommended Citation
GB/T 7714
Jiang, H,Yan, S,Liang, DX,et al. X-ray multilayer mid-frequency characterizations using speckle scanning techniques[C],2017.
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