CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
The construction of Si(2)Sb(2)Te(5) electrical probe storage based on UV nanoimprint lithography
Liu, YB; Zhang, T; Zhang, GX(张国欣); Song, ZT; Zhang, J; Zhou, WM; Zhang, JP; Liu, YB (reprint author), Shanghai Nanotechnol Promot Ctr, Lab Nanotechnol, Shanghai 200237, Peoples R China
2009
Source PublicationNANOTECHNOLOGY
ISSN0957-4484
Volume20Issue:31Pages:5
AbstractThe Si(2)Sb(2)Te(5) (SST) storage array with a density of 2.4 Gbit inch(-2) was fabricated by UV nanoimprint lithography (UV-NIL) and filling semiconductor technology. The area of the SST storage cell contacted with electrodes was 0.031 mu m(2). Structural transformation of SST during heating was in situ studied by time-resolved x-ray diffraction (XRD). An electrical probe storage system was constructed by SST combining with a conductive atomic force microscope (C-AFM) with a nanoprobe. Switching of the SST electrical probe storage cell from the high resistance state to the low resistance state had been achieved, and the rate of these two resistance states was 37.71. The current increased apparently when the applied voltage exceeded 1.79 V.
Subject AreaScience & Technology - Other Topics ; Materials Science ; Physics
Indexed BySCI
Language英语
Funding Project应物所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/7084
Collection中科院上海应用物理研究所2004-2010年
Corresponding AuthorLiu, YB (reprint author), Shanghai Nanotechnol Promot Ctr, Lab Nanotechnol, Shanghai 200237, Peoples R China
Recommended Citation
GB/T 7714
Liu, YB,Zhang, T,Zhang, GX,et al. The construction of Si(2)Sb(2)Te(5) electrical probe storage based on UV nanoimprint lithography[J]. NANOTECHNOLOGY,2009,20(31):5.
APA Liu, YB.,Zhang, T.,Zhang, GX.,Song, ZT.,Zhang, J.,...&Liu, YB .(2009).The construction of Si(2)Sb(2)Te(5) electrical probe storage based on UV nanoimprint lithography.NANOTECHNOLOGY,20(31),5.
MLA Liu, YB,et al."The construction of Si(2)Sb(2)Te(5) electrical probe storage based on UV nanoimprint lithography".NANOTECHNOLOGY 20.31(2009):5.
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