CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
Highly (111)-textured diamond film growth with high nucleation density
Yang, SM; Wan, DY; He, ZT(贺周同); Xia, HH(夏汇浩); Zhu, DZ(朱德彰); Gong, JL(巩金龙); Gong, JL (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
2008
Source PublicationNUCLEAR SCIENCE AND TECHNIQUES
ISSN1001-8042
Volume19Issue:3Pages:147
AbstractIn a traditional hot-filament chemical vapor deposition (HF-CVD) system, highly (111)-textured diamond film was deposited on Si (111) substrate treated by diamond powder ultrasonic scratching or other methods. The relationship between the (111)-textured diamond film growth and the nucleation density has been discussed. The morphologies and structures of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy.
Subject AreaScience & Technology - Other Topics
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000258910300005
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/7746
Collection中科院上海应用物理研究所2004-2010年
Corresponding AuthorGong, JL (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
Recommended Citation
GB/T 7714
Yang, SM,Wan, DY,He, ZT,et al. Highly (111)-textured diamond film growth with high nucleation density[J]. NUCLEAR SCIENCE AND TECHNIQUES,2008,19(3):147.
APA Yang, SM.,Wan, DY.,He, ZT.,Xia, HH.,Zhu, DZ.,...&Gong, JL .(2008).Highly (111)-textured diamond film growth with high nucleation density.NUCLEAR SCIENCE AND TECHNIQUES,19(3),147.
MLA Yang, SM,et al."Highly (111)-textured diamond film growth with high nucleation density".NUCLEAR SCIENCE AND TECHNIQUES 19.3(2008):147.
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