Knowledge Management System Of Shanghai Institute of Applied Physics, CAS
Highly (111)-textured diamond film growth with high nucleation density | |
Yang, SM; Wan, DY; He, ZT(贺周同); Xia, HH(夏汇浩); Zhu, DZ(朱德彰); Gong, JL(巩金龙); Gong, JL (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China | |
2008 | |
Source Publication | NUCLEAR SCIENCE AND TECHNIQUES
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ISSN | 1001-8042 |
Volume | 19Issue:3Pages:147 |
Abstract | In a traditional hot-filament chemical vapor deposition (HF-CVD) system, highly (111)-textured diamond film was deposited on Si (111) substrate treated by diamond powder ultrasonic scratching or other methods. The relationship between the (111)-textured diamond film growth and the nucleation density has been discussed. The morphologies and structures of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy. |
Subject Area | Science & Technology - Other Topics |
Indexed By | SCI |
Language | 英语 |
Funding Project | 应物所项目组 |
WOS ID | WOS:000258910300005 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.sinap.ac.cn/handle/331007/7746 |
Collection | 中科院上海应用物理研究所2004-2010年 |
Corresponding Author | Gong, JL (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China |
Recommended Citation GB/T 7714 | Yang, SM,Wan, DY,He, ZT,et al. Highly (111)-textured diamond film growth with high nucleation density[J]. NUCLEAR SCIENCE AND TECHNIQUES,2008,19(3):147. |
APA | Yang, SM.,Wan, DY.,He, ZT.,Xia, HH.,Zhu, DZ.,...&Gong, JL .(2008).Highly (111)-textured diamond film growth with high nucleation density.NUCLEAR SCIENCE AND TECHNIQUES,19(3),147. |
MLA | Yang, SM,et al."Highly (111)-textured diamond film growth with high nucleation density".NUCLEAR SCIENCE AND TECHNIQUES 19.3(2008):147. |
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