CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
Large-area and high-density silicon nanocone arrays by Ar+ sputtering at room temperature
Li, QT(李勤涛); Ni, ZC(倪志春); Yang, SM; Gong, JL(巩金龙); Zhu, DZ(朱德彰); Zhu, ZY(朱志远); Gong, JL (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
2008
Source PublicationNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN0168-583X
Volume266Issue:1Pages:197
AbstractThe large-area, high-density of similar to 1-2 x 10(9)/cm(2) silicon nanocone arrays by ion-irradiation with incident angle of 75 degrees have been achieved by using carbon-cone-mask. The scanning electron microscopy (SEM) images show that the width of silicon nanocones is similar to 150 nm and the height is similar to 400 mm. The investigation of SEM shows that the formation of the silicon nanocones proceeds through three periods, carbon nanocones-nanocones with carbon on the top and silicon at the bottom-silicon nanocones. (C) 2007 Published by Elsevier B.V.
Subject AreaNuclear Science & Technology ; Physics
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000253080300030
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/7763
Collection中科院上海应用物理研究所2004-2010年
Corresponding AuthorGong, JL (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
Recommended Citation
GB/T 7714
Li, QT,Ni, ZC,Yang, SM,et al. Large-area and high-density silicon nanocone arrays by Ar+ sputtering at room temperature[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2008,266(1):197.
APA Li, QT.,Ni, ZC.,Yang, SM.,Gong, JL.,Zhu, DZ.,...&Gong, JL .(2008).Large-area and high-density silicon nanocone arrays by Ar+ sputtering at room temperature.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,266(1),197.
MLA Li, QT,et al."Large-area and high-density silicon nanocone arrays by Ar+ sputtering at room temperature".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 266.1(2008):197.
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