CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray
Zhu, WZ(朱伟忠); Wu, YQ(吴衍青); Guo, Z(郭智); Zhu, XL; Ma, J; Xie, CQ; Shi, PX; Zhou, HJ; Huo, TL; Tai, RZ(邰仁忠); Xu, HJ(徐洪杰); Tai, RZ (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
2008
Source PublicationACTA PHYSICA SINICA
ISSN1000-3290
Volume57Issue:10Pages:6386
AbstractBased on the rigorous coupled-wave analysis, the optimized design for a transmission two-gratings mask for 13.4 nm soft X-ray interference lithography has been accomplished. Then a large area transmission gratings was successfully fabricated by electron beam lithography (EBL), which has an area of 1.5 mm x 1.5 mm, ruling period of 100 nm, Cr relief thickness of 50 nm, gap/period of 0.6, and Si3N4 substrate thickness of 100 nm. Based on the quantitative estimation of the measurement data, the first and second order diffraction efficiencies were determined as 4.41% and 0.49%, respectively, in good agreement with the numerical simulation results. Through comparison between the measurement and the numerical simulation results, it was shown that the relief is entirely vertical and the gap/period was well controlled. This two-grating mask will be used installed on the soft X-ray interference lithography endstation at Shanghai Synchrotron Radiation Facility (SSRF). With its 1st and 2nd order diffraction, 50 ran period and 25 nm period gratings can be cost-effectively fabricated, respectively.
Subject AreaChemistry ; Science & Technology - Other Topics ; Materials Science
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000260144300051
Citation statistics
Cited Times:5[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/7857
Collection中科院上海应用物理研究所2004-2010年
Corresponding AuthorTai, RZ (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
Recommended Citation
GB/T 7714
Zhu, WZ,Wu, YQ,Guo, Z,et al. The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray[J]. ACTA PHYSICA SINICA,2008,57(10):6386.
APA Zhu, WZ.,Wu, YQ.,Guo, Z.,Zhu, XL.,Ma, J.,...&Tai, RZ .(2008).The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray.ACTA PHYSICA SINICA,57(10),6386.
MLA Zhu, WZ,et al."The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray".ACTA PHYSICA SINICA 57.10(2008):6386.
Files in This Item: Download All
File Name/Size DocType Version Access License
The design, fabricat(405KB) 开放获取--View Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zhu, WZ(朱伟忠)]'s Articles
[Wu, YQ(吴衍青)]'s Articles
[Guo, Z(郭智)]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zhu, WZ(朱伟忠)]'s Articles
[Wu, YQ(吴衍青)]'s Articles
[Guo, Z(郭智)]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zhu, WZ(朱伟忠)]'s Articles
[Wu, YQ(吴衍青)]'s Articles
[Guo, Z(郭智)]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: The design, fabrication and performance of a large area 10000 line-mm metal transmission diffraction gratings for soft X-ray.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.