CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
10~(-10)Pa溅射离子泵和非蒸散型吸气剂的复合泵
蒋迪奎,陈丽萍,殷立新
2004
Source Publication真空科学与技术学报
Issue03
Abstract不改变商用SIP的基本结构 ,把NEG组件WP1 2 5 0装入SIP ,构成 (SIP +NEG)的XHV复合泵。它使SIP和NEG的特点互补 ,综合性能优越。NEG激活前 ,SIP单独抽气 ,极限压强 1 1× 1 0 -8Pa。NEG激活后 ,SIP和NEG联合抽气 ,复合泵的极限压强降到 7× 1 0 -1 0 Pa ,抽速稳定的范围更广 ,标称抽速约是SIP抽速的 2 5倍
Language中文
Funding Project应物所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/8125
Collection中科院上海应用物理研究所2004-2010年
Recommended Citation
GB/T 7714
蒋迪奎,陈丽萍,殷立新. 10~(-10)Pa溅射离子泵和非蒸散型吸气剂的复合泵[J]. 真空科学与技术学报,2004(03).
APA 蒋迪奎,陈丽萍,殷立新.(2004).10~(-10)Pa溅射离子泵和非蒸散型吸气剂的复合泵.真空科学与技术学报(03).
MLA 蒋迪奎,陈丽萍,殷立新."10~(-10)Pa溅射离子泵和非蒸散型吸气剂的复合泵".真空科学与技术学报 .03(2004).
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