CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
Fabrication of true-color micropatterns by 2D stepwise contraction and adsorption nanolithography (scan)
Li, H(李海); Zhang, XD; Zhang, Y(张益); Ouyang, ZQ; Hu, J(胡钧); Zhang, XD (reprint author), Shanghai Jiao Tong Univ, Coll Life Sci & Biotechnol, BioX DNA Comp Consortium, BioX Life Sci Res Ctr, 800 Dongchuan Rd, Shanghai 200240, Peoples R China
2007
Source PublicationSURFACE REVIEW AND LETTERS
ISSN0218-625X
Volume14Issue:1Pages:129
AbstractFabrication of structures on the micro- and nanometer scales is of great importance for both fundamental research and potential applications. While microlithography methods are relatively established, the production of multi-component micro-and nanostructures with high density still presents difficulties. In this paper, a novel strategy termed as two-dimensional (2D) stepwise contraction and adsorption nanolithography (SCAN) is used to fabricate true-color micropatterns through a series of size-reduction process based on the physical elasticity of elastomer. Faithful multicolor patterns with feature size about 30 times smaller than the initial ones can be fabricated by employing the 2D SCAN. The simplicity and high throughput capability of SCAN make it a competitive alternative to other micro- and nanolithography techniques.
KeywordSize Reduction High Density Multicolor Micropatterns Contact Printing 2d Stepwise Contraction Adsorption Nanolithography (Scan)
Subject AreaChemistry
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000250865800017
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/8282
Collection中科院上海应用物理研究所2004-2010年
Corresponding AuthorZhang, XD (reprint author), Shanghai Jiao Tong Univ, Coll Life Sci & Biotechnol, BioX DNA Comp Consortium, BioX Life Sci Res Ctr, 800 Dongchuan Rd, Shanghai 200240, Peoples R China
Recommended Citation
GB/T 7714
Li, H,Zhang, XD,Zhang, Y,et al. Fabrication of true-color micropatterns by 2D stepwise contraction and adsorption nanolithography (scan)[J]. SURFACE REVIEW AND LETTERS,2007,14(1):129.
APA Li, H,Zhang, XD,Zhang, Y,Ouyang, ZQ,Hu, J,&Zhang, XD .(2007).Fabrication of true-color micropatterns by 2D stepwise contraction and adsorption nanolithography (scan).SURFACE REVIEW AND LETTERS,14(1),129.
MLA Li, H,et al."Fabrication of true-color micropatterns by 2D stepwise contraction and adsorption nanolithography (scan)".SURFACE REVIEW AND LETTERS 14.1(2007):129.
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