CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
High-efficiency stepwise contraction and adsorption nanolithography
Tan, L; Ouyang, Z; Liu, M; Ell, J; Hu, J(胡钧); Patten, TE; Liu, GY; Liu, GY (reprint author), Univ Calif Davis, Dept Chem, 1 Shields Ave, Davis, CA 95616 USA
2006
Source PublicationJOURNAL OF PHYSICAL CHEMISTRY B
ISSN1520-6106
Volume110Issue:46Pages:23315
AbstractA new miniaturization protocol is demonstrated using stretching and relaxation of an elastomer substrate. A designed microstructure is formed on the stretched substrate and subsequently becomes miniaturized when the substrate relaxes. More importantly, the miniaturized structures can be transferred onto a new substrate for further miniaturization or can be utilized as stamps for nanolithography of designated materials. As an example of this approach, an elastic mold was first cast from a Si mold containing periodic line arrays of 1.5-mu m line width. Upon relaxation, line width is reduced to 240 nm. The new elastomer may be used as stamps for micro- and nanofabrication of materials such as proteins. The polymer surface roughness or wrinkling behavior at nanoscale is found to follow classic stability model in solid mechanics. This observation provides means to design and control the surface roughness to meet specific requirements.
Subject AreaBiochemistry & Molecular Biology ; Biophysics
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000242045900058
Citation statistics
Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/8293
Collection中科院上海应用物理研究所2004-2010年
Corresponding AuthorLiu, GY (reprint author), Univ Calif Davis, Dept Chem, 1 Shields Ave, Davis, CA 95616 USA
Recommended Citation
GB/T 7714
Tan, L,Ouyang, Z,Liu, M,et al. High-efficiency stepwise contraction and adsorption nanolithography[J]. JOURNAL OF PHYSICAL CHEMISTRY B,2006,110(46):23315.
APA Tan, L.,Ouyang, Z.,Liu, M.,Ell, J.,Hu, J.,...&Liu, GY .(2006).High-efficiency stepwise contraction and adsorption nanolithography.JOURNAL OF PHYSICAL CHEMISTRY B,110(46),23315.
MLA Tan, L,et al."High-efficiency stepwise contraction and adsorption nanolithography".JOURNAL OF PHYSICAL CHEMISTRY B 110.46(2006):23315.
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