CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
单色仪转角重复精度的相位板衍射准直方法测量
巩志华; 陈敏; 王勇; 严睿; 邰仁忠
2009
Source Publication光学学报
Issue10
Abstract为准确测量上海光源软X射线谱学显微光束线采用的变包含角平面光栅单色仪的转角重复精度,提出了一种新的基于相位板衍射准直技术的测量方法。该方法将半导体激光单模光纤和相位板衍射准直技术结合起来,利用面阵CCD采集图像,通过测量光斑的位移变化确定平面镜和光栅的角度变化。实验表明,该方法可以测量掠入射情况下单色仪联动时的转角重复精度,测量精度可达±0.1″,此测量精度优于同等实验条件下的商用ELCOMAT3000自准直仪的测量精度。
Keyword测量 相位板 衍射准直 平面光栅单色仪
Indexed ByCNKI
Language中文
Funding Project应物所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/8448
Collection中科院上海应用物理研究所2004-2010年
Corresponding Author巩志华
Recommended Citation
GB/T 7714
巩志华,陈敏,王勇,等. 单色仪转角重复精度的相位板衍射准直方法测量[J]. 光学学报,2009(10).
APA 巩志华,陈敏,王勇,严睿,&邰仁忠.(2009).单色仪转角重复精度的相位板衍射准直方法测量.光学学报(10).
MLA 巩志华,et al."单色仪转角重复精度的相位板衍射准直方法测量".光学学报 .10(2009).
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