CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
Characterizing Atomic Force Microscopy Tip Shape in Use
Wang, CM; Itoh, H; Sun, JL; Hu, J(胡钧); Shen, DH; Ichimura, S
2009
Conference Name6th International Conference on Nanoscience and Technology
Source PublicationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Pages803
Conference DateJUN 04-06, 2007
Conference PlaceBeijing, PEOPLES R CHINA
AbstractA new tip characterizer based on the fabrication of multilayer thin films for atomic force microscopy (AFM) was developed to analyze the effective tip shape while in use. The precise structure of this tip characterizer was measured by transmission electron microscopy. Four different types of commercial tips with various radii were characterized by the tip characterizer and by conventional scanning electron microscopy (SEM). The results were compared to obtain a relationship between the actual and effective tip shapes. A quantitative analysis was performed of apex radii measured from line profiles of comb-shaped patterns and nanometer-scale knife-edges without the problem of edge uncertainty in the SEM image. Degradation of the AFM tip induced by electron-beam irradiation was studied by using SEM and the tip characterizer. A potential technique for fabricating symmetric AFM tips based on irradiation by an electron beam and a quantitative analysis of changing the tip apex in SEM were examined with AFM using the tip characterizer.
ISSN1533-4880
Indexed BySCI
Funding Project应物所课题组
Language英语
Document Type会议论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/8824
Collection中科院上海应用物理研究所2004-2010年
Recommended Citation
GB/T 7714
Wang, CM,Itoh, H,Sun, JL,et al. Characterizing Atomic Force Microscopy Tip Shape in Use[C],2009:803.
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