Knowledge Management System Of Shanghai Institute of Applied Physics, CAS
| Effect of Argon ion irradiation on grain orientation in platinum thin films | |
| Jiang, BJ; Jiang, J; Ren, CX; Liu, XH; Wang, X; Feng, T; Zhang, ZX; Song, ZT; Zheng, LP（郑里平） | |
| 2005 | |
| Source Publication | THIN SOLID FILMS
 |
| ISSN | 0040-6090 |
| Volume | 483Issue:40910Pages:411 |
| Abstract | Platinum thin films were prepared on Mo/Si(100) substrate by Argon ion beam assisted deposition. X-ray diffraction analysis showed that the crystal orientation in Pt film was influenced by the incidence angle of the Ar+ beam. The films exhibited preferred (111) orientation without concurrent ion beam bombardment. The films, which were deposited with simultaneous bombardment by a 500 eV Ar+ beam along normal direction, showed mixed (111) and (200) orientation. Tilting the Ar+ beam off the normal direction of the film surface, the film exhibited highly preferred (111) orientation, even at the tilting angle of 45 degrees. The results suggested that the surface free energy of (111) plane is much lower than that of other lattice planes and dominates during the film growing. (c) 2005 Published by Elsevier B.V. |
| Indexed By | SCI |
| Language | 中文 |
| Funding Project | 应物所项目组 |
| WOS ID | WOS:000229681700067 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.sinap.ac.cn/handle/331007/9409 |
| Collection | 中科院上海应用物理研究所2004-2010年 |
| Recommended Citation GB/T 7714 | Jiang, BJ,Jiang, J,Ren, CX,et al. Effect of Argon ion irradiation on grain orientation in platinum thin films[J]. THIN SOLID FILMS,2005,483(40910):411. |
| APA | Jiang, BJ.,Jiang, J.,Ren, CX.,Liu, XH.,Wang, X.,...&Zheng, LP.(2005).Effect of Argon ion irradiation on grain orientation in platinum thin films.THIN SOLID FILMS,483(40910),411. |
| MLA | Jiang, BJ,et al."Effect of Argon ion irradiation on grain orientation in platinum thin films".THIN SOLID FILMS 483.40910(2005):411. |
| Files in This Item: | Download All | |||||
| File Name/Size | DocType | Version | Access | License | ||
| Effect of Argon ion （204KB） | 开放获取 | -- | View Download | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment