CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
Effect of Argon ion irradiation on grain orientation in platinum thin films
Jiang, BJ; Jiang, J; Ren, CX; Liu, XH; Wang, X; Feng, T; Zhang, ZX; Song, ZT; Zheng, LP(郑里平)
2005
Source PublicationTHIN SOLID FILMS
ISSN0040-6090
Volume483Issue:40910Pages:411
AbstractPlatinum thin films were prepared on Mo/Si(100) substrate by Argon ion beam assisted deposition. X-ray diffraction analysis showed that the crystal orientation in Pt film was influenced by the incidence angle of the Ar+ beam. The films exhibited preferred (111) orientation without concurrent ion beam bombardment. The films, which were deposited with simultaneous bombardment by a 500 eV Ar+ beam along normal direction, showed mixed (111) and (200) orientation. Tilting the Ar+ beam off the normal direction of the film surface, the film exhibited highly preferred (111) orientation, even at the tilting angle of 45 degrees. The results suggested that the surface free energy of (111) plane is much lower than that of other lattice planes and dominates during the film growing. (c) 2005 Published by Elsevier B.V.
Indexed BySCI
Language中文
Funding Project应物所项目组
WOS IDWOS:000229681700067
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9409
Collection中科院上海应用物理研究所2004-2010年
Recommended Citation
GB/T 7714
Jiang, BJ,Jiang, J,Ren, CX,et al. Effect of Argon ion irradiation on grain orientation in platinum thin films[J]. THIN SOLID FILMS,2005,483(40910):411.
APA Jiang, BJ.,Jiang, J.,Ren, CX.,Liu, XH.,Wang, X.,...&Zheng, LP.(2005).Effect of Argon ion irradiation on grain orientation in platinum thin films.THIN SOLID FILMS,483(40910),411.
MLA Jiang, BJ,et al."Effect of Argon ion irradiation on grain orientation in platinum thin films".THIN SOLID FILMS 483.40910(2005):411.
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