CAS OpenIR  > 中科院上海应用物理研究所2011-2020年
Cantilever Tilt Causing Amplitude Related Convolution in Dynamic Mode Atomic Force Microscopy
Wang, Chunmei(王春梅); Sun, Jielin(孙洁林); Itoh, Hiroshi; Shen, Dianhong; Hu, Jun(胡钧)
2011
Source PublicationANALYTICAL SCIENCES
ISSN0910-6340
Volume27Issue:2Pages:143
AbstractIt is well known that the topography in atomic force microscopy (AFM) is a convolution of the tip's shape and the sample's geometry. The classical convolution model was established in contact mode assuming a static probe, but it is no longer valid in dynamic mode AFM. It is still not well understood whether or how the vibration of the probe in dynamic mode affects the convolution. Such ignorance complicates the interpretation of the topography. Here we propose a convolution model for dynamic mode by taking into account the typical design of the cantilever tilt in AFMs, which leads to a different convolution from that in contact mode. Our model indicates that the cantilever tilt results in a dynamic convolution affected by the absolute value of the amplitude, especially in the case that corresponding contact convolution has sharp edges beyond certain angle. The effect was experimentally demonstrated by a perpendicular SiO(2)/Si super-lattice structure. Our model is useful for quantitative characterizations in dynamic mode, especially in probe characterization and critical dimension measurements.
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000287823700005
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9465
Collection中科院上海应用物理研究所2011-2020年
Recommended Citation
GB/T 7714
Wang, Chunmei,Sun, Jielin,Itoh, Hiroshi,et al. Cantilever Tilt Causing Amplitude Related Convolution in Dynamic Mode Atomic Force Microscopy[J]. ANALYTICAL SCIENCES,2011,27(2):143.
APA Wang, Chunmei,Sun, Jielin,Itoh, Hiroshi,Shen, Dianhong,&Hu, Jun.(2011).Cantilever Tilt Causing Amplitude Related Convolution in Dynamic Mode Atomic Force Microscopy.ANALYTICAL SCIENCES,27(2),143.
MLA Wang, Chunmei,et al."Cantilever Tilt Causing Amplitude Related Convolution in Dynamic Mode Atomic Force Microscopy".ANALYTICAL SCIENCES 27.2(2011):143.
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