CAS OpenIR  > 中科院上海应用物理研究所2011-2020年
Fabrication and application of high quality poly(dimethylsiloxane) stamps by gamma ray irradiation
Yang, HaiJun(杨海军); Wang, HuaBin(王化斌); Hou, ZhengChi(侯铮迟); Wang, Peng; Li, Bin(李宾); Li, JingYe(李景烨); Hu, Jun(胡钧)
2011
Source PublicationJOURNAL OF MATERIALS CHEMISTRY
ISSN0959-9428
Volume21Issue:12Pages:4279
AbstractPoly(dimethylsiloxane) (PDMS) is the most widely used stamp material in soft lithography. Usually, it is thermally vulcanized and can't satisfy all the demands of the resolution, purity and solvent compatibility. In this work, high energy gamma rays are used to crosslink the PDMS base to fabricate stamps designed for soft lithography without the use of a catalyst. PDMS stamps fabricated in this way have several advantages including high resolution, purity and solvent resistance. The PDMS stamp crosslinked at an absorbed dose of 800 kGy has a roughness of 0.18 nm in blank area and can replicate features with the height of 1.1 nm. The amount of uncrosslinked molecules in the bulk of the stamp is only half of that of the 'standard' stamp (made by Sylgard (TM) 184 at the base/cure agent ratio of 10). Furthermore, the shear elastic modulus of stamps made by radiation induced crosslinking increases with the absorbed dose in the range of 400 kGy to 800 kGy and is higher than that of 'standard' stamps. By measuring the glass transition temperature and calculating molecular weights between crosslinkers, we conclude that the enhancement of stamps' quality can be ascribed to the increase of crosslinking density under gamma ray irradiation.
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000288220600041
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9511
Collection中科院上海应用物理研究所2011-2020年
Recommended Citation
GB/T 7714
Yang, HaiJun,Wang, HuaBin,Hou, ZhengChi,et al. Fabrication and application of high quality poly(dimethylsiloxane) stamps by gamma ray irradiation[J]. JOURNAL OF MATERIALS CHEMISTRY,2011,21(12):4279.
APA Yang, HaiJun.,Wang, HuaBin.,Hou, ZhengChi.,Wang, Peng.,Li, Bin.,...&Hu, Jun.(2011).Fabrication and application of high quality poly(dimethylsiloxane) stamps by gamma ray irradiation.JOURNAL OF MATERIALS CHEMISTRY,21(12),4279.
MLA Yang, HaiJun,et al."Fabrication and application of high quality poly(dimethylsiloxane) stamps by gamma ray irradiation".JOURNAL OF MATERIALS CHEMISTRY 21.12(2011):4279.
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