CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
Investigation of vacuum performances of TiZrV coated pipe
Zhang Haiou; Dai Dongdong; Tang Ziyi; Zhang Jidong; Shao Bin; He Suixia
2011
Source PublicationNUCLEAR SCIENCE AND TECHNIQUES
ISSN1001-8042
Volume22Issue:6Pages:326
AbstractSome metal compounds called as Non-Evaporable-Getter have been widely used to improve vacuum system performance of accelerator facility. In this paper, a TiZrV film on the surface of stainless steel vacuum pipe is made by direct current magnetron sputtering, and its vacuum performance is experimentally studied. Our results show that the TiZrV film is partly activated at 160 degrees C, and its pressure performance is similar with one at higher temperature. The coating reduces the ultimate pressure and prominently shortens the pressure-down time in a sputter ion pump system, thus creating evenly distributed pressure profile in a coating pipe. The adsorption rate is steady, and adsorption amount increases linearly. Such TiZrV-coated pipe behaves like pump other than gas source in vacuum system.
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000302332500002
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9531
Collection中科院上海应用物理研究所2011-2019年
Recommended Citation
GB/T 7714
Zhang Haiou,Dai Dongdong,Tang Ziyi,et al. Investigation of vacuum performances of TiZrV coated pipe[J]. NUCLEAR SCIENCE AND TECHNIQUES,2011,22(6):326.
APA Zhang Haiou,Dai Dongdong,Tang Ziyi,Zhang Jidong,Shao Bin,&He Suixia.(2011).Investigation of vacuum performances of TiZrV coated pipe.NUCLEAR SCIENCE AND TECHNIQUES,22(6),326.
MLA Zhang Haiou,et al."Investigation of vacuum performances of TiZrV coated pipe".NUCLEAR SCIENCE AND TECHNIQUES 22.6(2011):326.
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