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Investigation of vacuum performances of TiZrV coated pipe | |
Zhang Haiou; Dai Dongdong; Tang Ziyi; Zhang Jidong; Shao Bin; He Suixia | |
2011 | |
Source Publication | NUCLEAR SCIENCE AND TECHNIQUES
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ISSN | 1001-8042 |
Volume | 22Issue:6Pages:326 |
Abstract | Some metal compounds called as Non-Evaporable-Getter have been widely used to improve vacuum system performance of accelerator facility. In this paper, a TiZrV film on the surface of stainless steel vacuum pipe is made by direct current magnetron sputtering, and its vacuum performance is experimentally studied. Our results show that the TiZrV film is partly activated at 160 degrees C, and its pressure performance is similar with one at higher temperature. The coating reduces the ultimate pressure and prominently shortens the pressure-down time in a sputter ion pump system, thus creating evenly distributed pressure profile in a coating pipe. The adsorption rate is steady, and adsorption amount increases linearly. Such TiZrV-coated pipe behaves like pump other than gas source in vacuum system. |
Indexed By | SCI |
Language | 英语 |
Funding Project | 应物所项目组 |
WOS ID | WOS:000302332500002 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.sinap.ac.cn/handle/331007/9531 |
Collection | 中科院上海应用物理研究所2011-2020年 |
Recommended Citation GB/T 7714 | Zhang Haiou,Dai Dongdong,Tang Ziyi,et al. Investigation of vacuum performances of TiZrV coated pipe[J]. NUCLEAR SCIENCE AND TECHNIQUES,2011,22(6):326. |
APA | Zhang Haiou,Dai Dongdong,Tang Ziyi,Zhang Jidong,Shao Bin,&He Suixia.(2011).Investigation of vacuum performances of TiZrV coated pipe.NUCLEAR SCIENCE AND TECHNIQUES,22(6),326. |
MLA | Zhang Haiou,et al."Investigation of vacuum performances of TiZrV coated pipe".NUCLEAR SCIENCE AND TECHNIQUES 22.6(2011):326. |
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