CAS OpenIR  > 中科院上海原子核所2003年前
Combinatorial ion synthesis and ion beam analyses of materials libraries on thermally grown SiO2
Chen, CM; Pan, HC; Zhu, DZ(朱德彰); Hu, J(胡钧); Li, MQ(李民乾)
2000
Conference NameInternational Conference on Advanced Materials: Sympopsium M - Silicon-based Materials and Devices
Source PublicationMATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
Pages113
Conference DateJUN 13-18, 1999
Conference PlaceBEIJING, PEOPLES R CHINA
AbstractWe first report a method combining ion implantation and physical masking to generate material libraries of various ion-implanted samples. This approach offers rapid synthesis of samples with potential new compounds formed in the matrix, which may have specific luminescent properties. The depth-resolved cathodoluminescence (CL) measurements, accompanied with Rutherford backscattering spectrometry (RBS) and proton elastic scattering (PES) revealed some specific optical properties in the samples correlated with implanted ion distributions. These measurements are capable of nondestructively and rapidly characterizing the composition and the inhomogeneity of the combinatorial film libraries, which may determine their physical properties. (C) 2000 Elsevier Science S.A. All rights reserved.
ISSN0921-5107
Indexed BySCI
Funding Project应物所课题组
Language英语
Document Type会议论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9790
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
Chen, CM,Pan, HC,Zhu, DZ,et al. Combinatorial ion synthesis and ion beam analyses of materials libraries on thermally grown SiO2[C],2000:113.
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