CAS OpenIR  > 中科院上海原子核所2003年前
DEPOSITION OF HYDROGENATED CARBON LAYERS FROM CH3+ ION-BEAMS
WANG, WM; ECKSTEIN, W; SCHWORER, R; PLANK, H; ROTH, J
1995
Conference Name11th International Conference on Plasma Surface Interactions in Controlled Fusion Devices (PSI-1l)
Source PublicationJOURNAL OF NUCLEAR MATERIALS
Pages1033
Conference DateMAY 23-27, 1994
Conference PlaceMITO, JAPAN
AbstractCarbon deposition and hydrogen codeposition is investigated as function of ion energy, fluence and target temperature at normal incidence by bombardment of hydrocarbon molecules onto Si and graphite. An amorphous hydrogen/carbon (a-C:H) layer is formed in a thickness range of 40 to 130 nm by CH3+ bombardment up to a fluence of 3 x 10(18)/cm(2). The deposition process and the re-erosion phenomenon of the carbon film is also studied. The experimental results are compared with TRIDYN computer simulation and previous experimental results of carbon sputtering by atomic H+ and C+ beams in order to have a good understanding of the interaction between hydrocarbon molecular ions and the carbon-based wall in fusion devices.
ISSN0022-3115
Indexed BySCI
Funding Project应物所课题组
Language英语
Document Type会议论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9792
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
WANG, WM,ECKSTEIN, W,SCHWORER, R,et al. DEPOSITION OF HYDROGENATED CARBON LAYERS FROM CH3+ ION-BEAMS[C],1995:1033.
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