CAS OpenIR  > 中科院上海原子核所2003年前
Calculation of sputtering yields under high-fluence bombardment of a CuxN1-x alloy
Zheng, LP(郑里平); Li, RS; Li, MY
1998
Source PublicationVACUUM
ISSN0042-207X
Volume51Issue:3Pages:413
AbstractUnder 2 keV Ar ion bombardment of a CuxNi1-x alloy, at high fluence and at low temperature, Cu and Ni sputtering yields, the total sputtering yield (Cu+Ni yields), and the sputtering yields from the first surface layer and from beneath this layer for Cu and Ni, have been separately calculated by an improved kinetic BIGS (bombardment-induced Gibbsian segregation) model. Calculations indicate that these sputtering yields are strongly dependant on the Cu (segregating species) bulk composition. A cause of the possible correlation between sputtering angular distribution and bulk composition of the segregating species is also analysed for the segregating system. (C) 1998 Elsevier Science Ltd. All rights reserved.
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000077209100016
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9888
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
Zheng, LP,Li, RS,Li, MY. Calculation of sputtering yields under high-fluence bombardment of a CuxN1-x alloy[J]. VACUUM,1998,51(3):413.
APA Zheng, LP,Li, RS,&Li, MY.(1998).Calculation of sputtering yields under high-fluence bombardment of a CuxN1-x alloy.VACUUM,51(3),413.
MLA Zheng, LP,et al."Calculation of sputtering yields under high-fluence bombardment of a CuxN1-x alloy".VACUUM 51.3(1998):413.
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