CAS OpenIR  > 中科院上海原子核所2003年前
Cathodoluminescence and ion beam analysis of ion-implanted combinatorial materials libraries on thermally grown SiO2
Chen, CM(陈昌明); Pan, HC; Zhu, DZ(朱德彰); Hu, J(胡钧); Li, MQ(李民乾)
1999
Source PublicationNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN0168-583X
Volume159Issue:40910Pages:81
AbstractA method combining ion implantation and physical masking technique has been used to generate material libraries of various ion-implanted samples. Ion species of C, Ga, N, Pb, Sn, Y have been sequentially implanted to an SiO2 film grown on a silicon wafer through combinatorial masks and consequently a library of 64 (2(6)) samples is generated by 6 masking combinations. This approach offers rapid synthesis of samples with potential new compounds formed in the matrix, which may have specific luminescent properties. The depth-resolved cathodoluminescence (CL) measurements revealed some specific optical property in the samples correlated with implanted ion distributions. A marker-based technique is developed for the convenient location of sample site in the analysis of Rutherford backscattering spectrometry (RBS) and proton elastic scattering (PES), intended to characterize rapidly the ion implanted film libraries. These measurements demonstrate the power of nondestructively and rapidly characterizing composition and the inhomogeneity of the combinatorial film libraries, which may determine their physical properties. (C) 1999 Elsevier Science B.V. All rights reserved.
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000083561900010
Citation statistics
Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9893
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
Chen, CM,Pan, HC,Zhu, DZ,et al. Cathodoluminescence and ion beam analysis of ion-implanted combinatorial materials libraries on thermally grown SiO2[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1999,159(40910):81.
APA Chen, CM,Pan, HC,Zhu, DZ,Hu, J,&Li, MQ.(1999).Cathodoluminescence and ion beam analysis of ion-implanted combinatorial materials libraries on thermally grown SiO2.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,159(40910),81.
MLA Chen, CM,et al."Cathodoluminescence and ion beam analysis of ion-implanted combinatorial materials libraries on thermally grown SiO2".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 159.40910(1999):81.
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