CAS OpenIR  > 中科院上海原子核所2003年前
Combinatorial ion synthesis and ion beam analyses of materials libraries on thermally grown SiO2
Chen, CM(陈昌明); Pan, HC; Zhu, DZ(朱德彰); Hu, J(胡钧); Li, MQ(李民乾)
2000
Source PublicationMATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
ISSN0921-5107
Volume72Issue:40942Pages:113
AbstractWe first report a method combining ion implantation and physical masking to generate material libraries of various ion-implanted samples. This approach offers rapid synthesis of samples with potential new compounds formed in the matrix, which may have specific luminescent properties. The depth-resolved cathodoluminescence (CL) measurements, accompanied with Rutherford backscattering spectrometry (RBS) and proton elastic scattering (PES) revealed some specific optical properties in the samples correlated with implanted ion distributions. These measurements are capable of nondestructively and rapidly characterizing the composition and the inhomogeneity of the combinatorial film libraries, which may determine their physical properties. (C) 2000 Elsevier Science S.A. All rights reserved.
Indexed BySCI
Language英语
Funding Project应物所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9907
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
Chen, CM,Pan, HC,Zhu, DZ,et al. Combinatorial ion synthesis and ion beam analyses of materials libraries on thermally grown SiO2[J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,2000,72(40942):113.
APA Chen, CM,Pan, HC,Zhu, DZ,Hu, J,&Li, MQ.(2000).Combinatorial ion synthesis and ion beam analyses of materials libraries on thermally grown SiO2.MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,72(40942),113.
MLA Chen, CM,et al."Combinatorial ion synthesis and ion beam analyses of materials libraries on thermally grown SiO2".MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 72.40942(2000):113.
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