CAS OpenIR  > 中科院上海原子核所2003年前
DEPOSITION OF HYDROGENATED CARBON LAYERS FROM CH3+ ION-BEAMS
WANG, WM(王玟珉); ECKSTEIN, W; SCHWORER, R; PLANK, H; ROTH, J
1995
Source PublicationJOURNAL OF NUCLEAR MATERIALS
ISSN0022-3115
Volume220Pages:1033
AbstractCarbon deposition and hydrogen codeposition is investigated as function of ion energy, fluence and target temperature at normal incidence by bombardment of hydrocarbon molecules onto Si and graphite. An amorphous hydrogen/carbon (a-C:H) layer is formed in a thickness range of 40 to 130 nm by CH3+ bombardment up to a fluence of 3 x 10(18)/cm(2). The deposition process and the re-erosion phenomenon of the carbon film is also studied. The experimental results are compared with TRIDYN computer simulation and previous experimental results of carbon sputtering by atomic H+ and C+ beams in order to have a good understanding of the interaction between hydrocarbon molecular ions and the carbon-based wall in fusion devices.
Indexed BySCI
Language英语
Funding Project应物所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/9922
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
WANG, WM,ECKSTEIN, W,SCHWORER, R,et al. DEPOSITION OF HYDROGENATED CARBON LAYERS FROM CH3+ ION-BEAMS[J]. JOURNAL OF NUCLEAR MATERIALS,1995,220:1033.
APA WANG, WM,ECKSTEIN, W,SCHWORER, R,PLANK, H,&ROTH, J.(1995).DEPOSITION OF HYDROGENATED CARBON LAYERS FROM CH3+ ION-BEAMS.JOURNAL OF NUCLEAR MATERIALS,220,1033.
MLA WANG, WM,et al."DEPOSITION OF HYDROGENATED CARBON LAYERS FROM CH3+ ION-BEAMS".JOURNAL OF NUCLEAR MATERIALS 220(1995):1033.
Files in This Item: Download All
File Name/Size DocType Version Access License
DEPOSITION OF HYDROG(413KB) 开放获取--View Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[WANG, WM(王玟珉)]'s Articles
[ECKSTEIN, W]'s Articles
[SCHWORER, R]'s Articles
Baidu academic
Similar articles in Baidu academic
[WANG, WM(王玟珉)]'s Articles
[ECKSTEIN, W]'s Articles
[SCHWORER, R]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[WANG, WM(王玟珉)]'s Articles
[ECKSTEIN, W]'s Articles
[SCHWORER, R]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: DEPOSITION OF HYDROGENATED CARBON LAYERS FROM CH3+ ION-BEAMS.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.