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Nonuniform self-imaging of achromatic Talbot lithography 期刊论文
CHINESE OPTICS LETTERS, 2019, 卷号: 17, 期号: 6, 页码: -
Authors:  Xia, HJ;  Yang, SM;  Wang, LS;  Zhao, J;  Xue, CF;  Wu, YQ;  Tai, RZ
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INTERFEROMETRIC LITHOGRAPHY  INTERFERENCE  
The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF 期刊论文
JOURNAL OF SYNCHROTRON RADIATION, 2018, 卷号: 25, 期号: -, 页码: 1869-1876
Authors:  Xue, CF;  Meng, XY;  Wu, YQ;  Wang, Y;  Wang, LS;  Yang, SM;  Zhao, J;  Tai, RZ
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INTERFEROMETRIC LITHOGRAPHY  FABRICATION  PERFORMANCE  BAND  
High throughput fabrication of large-area plasmonic color filters by soft-X-ray interference lithography 期刊论文
OPTICS EXPRESS, 2016, 卷号: 24, 期号: 17, 页码: 19112-19121
Authors:  Sun, LB;  Hu, XL;  Wu, QJ;  Wang, LS;  Zhao, J;  Yang, SM;  Tai, RZ;  Fecht, HJ;  Zhang, DX;  Wang, LQ;  Jiang, JZ;  Wang, LQ (reprint author), Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China.;  Jiang, JZ (reprint author), Zhejiang Univ, Int Ctr New Struct Mat, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China.;  Jiang, JZ (reprint author), Zhejiang Univ, Sch Mat Sci & Engn, Hangzhou 310027, Zhejiang, Peoples R China.
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Development of broadband X-ray interference lithography large area exposure system 期刊论文
REVIEW OF SCIENTIFIC INSTRUMENTS, 2016, 卷号: 87, 期号: 4, 页码: —
Authors:  Xue, CF;  Wu, YQ;  Zhu, FY;  Yang, SM;  Liu, HG;  Zhao, J;  Wang, LS;  Tai, RZ;  Tai, RZ (reprint author), Chinese Acad Sci, Shanghai Synchrotron Radiat Facil, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China.
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Interferometric Lithography  High-resolution  Fabrication  Arrays  Grids  Light  
Developments at SSRF in soft X-ray interference lithography 期刊论文
NUCLEAR SCIENCE AND TECHNIQUES, 2015, 卷号: 26, 期号: 1, 页码: 5—11
Authors:  Yang, SM;  Wang, LS;  Zhao, J;  Xue, CF;  Liu, HG;  Xu, ZJ;  Wu, YQ;  Tai, RZ
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Interferometric Lithography  Gratings  Beam  Nanolithography  
同步辐射光束线中部分相干光的传播研究 学位论文
: 中国科学院研究生院, 2013
Authors:  孟祥雨
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X射线光学  部分相干光  互强度  相干长度  
Imaging cells and sub-cellular structures with ultrahigh resolution full-field X-ray microscopy 期刊论文
BIOTECHNOLOGY ADVANCES, 2013, 卷号: 31, 期号: 3, 页码: CONCATENATE(Sheet1!I159,-Sheet1!J159)
Authors:  Chien, C. C.;  Tseng, P. Y.;  Chen, H. H.;  Hua, T. E.;  Chen, S. T.;  Chen, Y. Y.;  Leng, W. H.;  Wang, C. H.;  Hwu, Y.;  Yin, G. C.;  Liang, K. S.;  Chen, F. R.;  Chu, Y. S.;  Yeh, H. I.;  Yang, Y. C.;  Yang, C. S.;  Zhang, G. L.;  Je, J. H.;  Margaritondo, G.
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Robust design of broadband EUV multilayer beam splitters based on particle swarm optimization 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2013, 卷号: 703, 页码: CONCATENATE(Sheet1!I284,-Sheet1!J284)
Authors:  Jiang, Hui;  Michette, Alan G.
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同步辐射光束线热缓释技术研究及冷却技术的应用 学位论文
, 上海应用物理研究所: 中国科学院上海应用物理研究所, 2006
Authors:  王纳秀
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同步辐射  高热负载热缓释  前端区  晶体单色器  电子束离子阱  
软X射线干涉光刻相关技术研究 学位论文
, 上海应用物理研究所: 中国科学院上海应用物理研究所, 2005
Authors:  朱伟忠
Adobe PDF(3265Kb)  |  Favorite  |  View/Download:332/0  |  Submit date:2012/04/11
软x射线金属型透射光栅  严格耦合波方法  电子束光刻  衍射效率  软x射线干涉光刻