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Nano-accuracy measurement technology of optical-surface profiles 会议论文
, Suzhou, PEOPLES R CHINA, APR 26-29, 2016
Authors:  Qian, SN;  Gao, B;  Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
Adobe PDF(773Kb)  |  Favorite  |  View/Download:148/48  |  Submit date:2017/03/02
Surface Profiler  Profilometer  Nano-accuracy  Preccise Measurement