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Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography 期刊论文
MICROELECTRONIC ENGINEERING, 2017, 卷号: 170, 页码: 49-53
Authors:  Zhao, J;  Wu, YQ;  Xue, CF;  Yang, SM;  Wang, LS;  Zhu, FY;  Zhu, ZC;  Liu, B;  Wang, Y;  Tai, RZ
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Periodic Structures  Scintillator  Soft X-ray Interference Lithography  High Aspect Ratio