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Optimization of pencil beam f-theta lens for high-accuracy metrology 期刊论文
OPTICAL ENGINEERING, 2018, 卷号: 57, 期号: 1, 页码: -
Authors:  Peng, CQ;  He, YM;  Wang, J
View  |  Adobe PDF(1178Kb)  |  Favorite  |  View/Download:180/104  |  Submit date:2018/09/06
Long Trace Profiler  Surface Profiler  Deflectometry  Ellipse  Mirrors  Circle  Range  
Normal tracing deflectometry using a secondary light source 期刊论文
JOURNAL OF SYNCHROTRON RADIATION, 2017, 卷号: 24, 期号: -, 页码: 765-774
Authors:  Peng, CQ;  He, YM;  Wang, J
View  |  Adobe PDF(1753Kb)  |  Favorite  |  View/Download:105/11  |  Submit date:2018/08/30
Surface Profiler  Accuracy  Mirrors  
Nano-accuracy measurement technology of optical-surface profiles 会议论文
, Suzhou, PEOPLES R CHINA, APR 26-29, 2016
Authors:  Qian, SN;  Gao, B;  Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
View  |  Adobe PDF(773Kb)  |  Favorite  |  View/Download:144/46  |  Submit date:2017/03/02
Surface Profiler  Profilometer  Nano-accuracy  Preccise Measurement