CAS OpenIR

Browse/Search Results:  1-1 of 1 Help

Selected(0)Clear Items/Page:    Sort:
Simulation and experimental study of aspect ratio limitation in Fresnel zone plates for hard-x-ray optics 期刊论文
APPLIED OPTICS, 2015, 卷号: 54, 期号: 32, 页码: 9630—9636
Authors:  Liu, JP;  Shao, JH;  Zhang, SC;  Ma, YQ;  Taksatorn, N;  Mao, CW;  Chen, YF;  Deng, BA;  Xiao, TQ;  Chen, YF (reprint author), Fudan Univ, Sch Informat Sci & Engn, State Key Lab ASIC & Syst, Nanolithog & Applicat Res Grp, Shanghai 200433, Peoples R China.
View  |  Adobe PDF(1164Kb)  |  Favorite  |  View/Download:150/53  |  Submit date:2016/03/04
Electron-beam Lithography  High-efficiency  Resolution  Fabrication  Microscopy  Resist