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Parallel direct writing achromatic talbot lithography: a method for large-area arbitrary sub-micron periodic nano-arrays fabrication 期刊论文
NANOTECHNOLOGY, 2019, 卷号: 30, 期号: 31, 页码: —
Authors:  Yang, SM;  Xue, CF;  Zhao, J;  Wang, LS;  Wu, YQ;  Tai, RZ
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BEAM INTERFERENCE LITHOGRAPHY  RESOLUTION  METAMATERIALS  METASURFACE  RESONANCES  SPLITTER  LIGHT  ANGLE  
Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers 期刊论文
JOURNAL OF SYNCHROTRON RADIATION, 2018, 卷号: 25, 页码: 785-792
Authors:  Jiang, H;  Wang, H;  Zhu, JT;  Xue, CF;  Zhang, JY;  Tian, NX;  Li, AG
View  |  Adobe PDF(1482Kb)  |  Favorite  |  View/Download:74/13  |  Submit date:2018/09/06
Nitride Thin-films  X-ray Mirrors  Surface-morphology  Optical-surfaces  Growth  Roughness  Layer  Microstructure  Reflectivity  Spectroscopy  
Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching 期刊论文
SCIENTIFIC REPORTS, 2018, 卷号: 8, 页码: -
Authors:  Wu, Q;  Liu, B;  Zhu, ZC;  Gu, M;  Chen, H;  Xue, CF;  Zhao, J;  Wu, YQ;  Tai, RZ;  Ouyang, XP
View  |  Adobe PDF(4184Kb)  |  Favorite  |  View/Download:75/13  |  Submit date:2018/09/06
Light-emitting-diodes  Extraction Efficiency  Wave-guide  Nanocrystals  Fluorescence  Scintillator  Enhancement  Substrate  Surface  Arrays  
The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF 期刊论文
JOURNAL OF SYNCHROTRON RADIATION, 2018, 卷号: 25, 期号: -, 页码: 1869-1876
Authors:  Xue, CF;  Meng, XY;  Wu, YQ;  Wang, Y;  Wang, LS;  Yang, SM;  Zhao, J;  Tai, RZ
View  |  Adobe PDF(1525Kb)  |  Favorite  |  View/Download:7/0  |  Submit date:2019/12/17
INTERFEROMETRIC LITHOGRAPHY  FABRICATION  PERFORMANCE  BAND  
Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography 期刊论文
MICROELECTRONIC ENGINEERING, 2017, 卷号: 170, 页码: 49-53
Authors:  Zhao, J;  Wu, YQ;  Xue, CF;  Yang, SM;  Wang, LS;  Zhu, FY;  Zhu, ZC;  Liu, B;  Wang, Y;  Tai, RZ
View  |  Adobe PDF(783Kb)  |  Favorite  |  View/Download:83/34  |  Submit date:2017/12/08
Periodic Structures  Scintillator  Soft X-ray Interference Lithography  High Aspect Ratio  
Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography 期刊论文
APPLIED SURFACE SCIENCE, 2017, 卷号: 425, 期号: -, 页码: 553-557
Authors:  Xue, CF;  Zhao, J;  Wu, YQ;  Yu, HN;  Yang, SM;  Wang, LS;  Zhao, WC;  Wu, Q;  Zhu, ZC;  Liu, B;  Zhang, X;  Zhou, WC;  Tai, RZ
View  |  Adobe PDF(1187Kb)  |  Favorite  |  View/Download:44/11  |  Submit date:2018/08/30
Extreme-ultraviolet  Nanoparticles  Resolution  Arrays  Light  
Enhancement of directional broadband luminescence from a scintillation film via guided-mode resonance in a photonic crystal structure 期刊论文
APPLIED PHYSICS LETTERS, 2017, 卷号: 110, 期号: 5, 页码: -
Authors:  Zhu, ZC;  Liu, B;  Cheng, CW;  Zhang, HF;  Chen, H;  Gu, M;  Liu, JL;  Chen, L;  Ouyang, XP;  Xue, CF;  Wu, YQ
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Influence of symmetry and duty cycles on the pattern generation in achromatic Talbot lithography 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2017, 卷号: 35, 期号: 2, 页码: -
Authors:  Yang, SM;  Zhao, J;  Wang, LS;  Zhu, FY;  Xue, CF;  Liu, HG;  Sang, HZ;  Wu, YQ;  Tai, RZ
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一种压强稳定的多级真空差分系统 期刊论文
真空科学与技术学报, 2017, 期号: 10, 页码: "951-956"
Authors:  刘俊男;  吴仁智;  薛松;  陈家华;  薛超凡
View  |  Adobe PDF(495Kb)  |  Favorite  |  View/Download:54/10  |  Submit date:2018/08/17
自由电子激光器  光束线  真空差分  压强反馈调节  
双光束白光干涉系统的理论模拟与实验研究 期刊论文
核技术, 2017, 期号: 8, 页码: "21-27"
Authors:  邓明君;  王勇;  薛超凡;  邰仁忠
View  |  Adobe PDF(2093Kb)  |  Favorite  |  View/Download:103/22  |  Submit date:2018/08/17
自由电子激光  双光束  白光干涉